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Permittivity, dielectric loss tangent and resistivity measurement
using Microwave Frequency Q-Meter with Split Post Dielectric Resonator (SPDR).
SPDRs are intended for the measurements of the complex permittivity of laminar dielectric materials including LTCC substrates, but also thin ferroelectric films deposited on low loss dielectric substrates. Additionally, SPDRs can be used for the measurements of the surface resistance and conductivity of various conducting materials such as commercial resistive layers, thin conductive polymer films or high resistivity semiconductors. Such measurements are only possible for large surface resistance samples with Rs > 5 kΩ/square.
Use of inexpensive computer controlled microwave oscillator system, Microwave Frequency Q-Meter, enabling quick and automatic measurements of permittivity, dielectric loss tangent and resistivity with a dedicated SPDR or resistivity and sheet resistance with a dedicated SiPDR.
To determine permittivity, dielectric loss tangent and resistivity, only two measurements should be performed. The first one, called reference measurements, is performed for empty resonator. The second one - for resonator containing  test sample.

The only external information is the thickness of the sample under test.
Microwave Frequency Q-Meter connected to the SPDR and to the computer. Dedicated application allows controlling measurement process and enables easy management of the measurements results.
Range of resistivity measurements for the SPDR: 200 - 105 Ωcm.
The measured permittivity, dielectric loss tangent and resistivity will appear in the green columns.
Read more about Resistivity and Surface resistance Measurements of Semiconductors and Conductors (pdf file, 2 MB).
Read more about resistivity measurement using Microwave Frequency Q-Meter with Single Post Dielectric Resonator (SiPDR).

Read more about sheet resistance for thin films measurement using Microwave Frequency Q-Meter with Split Post Dielectric Resonator (SPDR) and Single Post Dielectric Resonator (SiPDR).
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